3D PROFILER

Highlights

  • Five measurement techniques integrated into one platform
  • Non-contact 3D profiling and imaging
  • Measure surface roughness from Å to mils
  • Measure step height ranging from nm to mm




IMAGES

What is the true color and shape of the sample?
A well defined true color and 3D image is the first step in solving problems and making an informed decision about your test surfaces.




DIMENSIONS

How wide & tall?
Accurate dimensions for parts that you can only see under a microscope. Get lateral dimensions, step heights and wall angles, all from a single scan.




METROLOGY

How is the surface?
Calculating 2D and 3D roughness parameters from the millions of data points provides accurate topography information as opposed to data....




FILM THICKNESS

What else is on the surface?
Single or multi layers film thickness can be measured with the spectrometer option.







MACRO-AFM

Features too large or too rough for AFM?
Shown above is a inkjet printer component with dimensions beyond the capability of an AFM




MICRO-CMM

Features too fine for a CMM?
Shown above is a precision machined microwave channel where the wall angle and other dimensions cannot be measured with a conventional CMM tool




TIME TO DATA

In a hurry to measure multiple parameters?
The Zeta tool can image large areas AND provide dimensional, metrology and film related information, all in less than a minute for typical scans




COST OF DATA

Worried about cost and ROI?
Low initial investment and an even lower cost of maintenance enable cost sensitive applications such as monitoring the etch ...