ZetaScan Series

ZetaScan Series

ZETASCAN SERIES

The latest technology in defect inspection for glass wafers, rough film on wafers, disk substrates/media. Designed for transparent, thin substrate, rough surfaces.




MULTI-MODE DEFECT INSPECTION SOLUTION

The ZetaScan series are fully automated 300mm capable defect inspection tools that can address a variety of substrates such as opaque and transparent wafers as well as touch panels, rough ground, polished or unpolished substrates. Based on Zeta’s revolutionary multi-mode approach to inspection, the ZetaScan series defect inspectors provide high defect sensitivity at high throughput.


SCANNING BEAM OPTICS

  • Scanning Beam Optics combines the strong signal from a small spot beam (higher intensity than a line focus beam) with the speed of the scanning laser.
  • ZetaScan allows for any sample shape up to 370mm X 470mm, very thin samples, and other delicate samples, such as thin glass or bonded wafers.
  • 405nm laser diode with the latest technology in beam shaping optics.

MULTI-MODE OPTICS

  • ZSP – Zeta Specular measures reflectivity.
  • ZTP – Zeta Topography measures surface topography.
  • ZTS – Zeta Top Scatter measures scattering signal above the sample.
  • ZSS – Zeta Side Scatter measures scattering signal to the side of the sample
  • Other … give us your inspection challenge. The Zeta team is continuously developing new modes of defect detection.

AUTOMATED DEFECT CLASSIFICATION

The multiple-mode optics can be used for easy defect classification. In the glass wafer inspection example shown on the right, surface particles and interface particles can be separately classified based on the differences in the ZTP, ZSP and the ZSS images. ZetaScan’s innovative optical design also allows the user to simultaneously detect and accurately classify the bottom surface particles based on their optical signature. This unique capability is unmatched in the defect inspection industry.


ZetaScan Series
COMPREHENSIVE FULL WAFER INSPECTION

Defect Map on a 300mm Glass wafer

ZetaScan Series
MULTI-MODE INSPECTION

Optical Signature of different defects


ZetaScan Series

Scratches

Scratches are visible in multiple channels and can be easily classified.

ZetaScan Series

Stains on Glass

Randomly distributed stains can be seen in the specular channel.

ZetaScan Series

Embedded Defect

Embedded defects cause a disruption in the film (seen in topography image).

ZetaScan Series

Stains on Glass

Randomly distributed stains can be seen in the specular channel.


FAST FULL WAFER DEFECT MAPPING

The linear scanning motion of the incident beam is combined with the lateral motion of the wafer to quickly generate the full wafer defect map. This type of scan is faster, more stable and less sensitive to vibration as compared to other ‘helical’ or ‘spiral’ scan based tools.

ZETASCAN FEATURES & BENEFITS

  • Thin and transparent substrates – new detection optics design does not degrade signal as the substrate becomes thinner
  • Multiple channel detection provides the necessary signals to separate pits from particles down to submicron in size
  • New light collector design capable of detecting defects on rough surfaces or films.

PRODUCT CONFIGURATION & FEATURES

ZetaScan Series

Manual or Automated

  • ZetaScan: Manual Load System
  • ZetaScan-AUTO: System with 150mm or 200mm open cassette wafer handler
  • ZetaScan-EFEM: Automated System with 300mm EFEM/FOUP

Features

  • 300mm & 200mm with dual arm robot
  • Available edge grip option
  • Other type of samples on manual system
  • Integrated vibration isolation

Other Products

SYSTEM WITH MANUAL SAMPLE LOAD

ZETA-20

True Color 3D Optical Profiler

ZETA-300

Precision Surface Metrology

ZETA-500

3D Optical Profiler for 300mm Wafers

ZETA-600

3D Optical Profiler for Large Samples

CASSETTE TO CASSETTE LOAD

Wafer Handler

Wafer Handler & Sorter

EFEM Module

EFEM for 200/300mm wafers

ZETA-388

Optical Profiler for PSS and AOI

ZETA-580

Automated 300mm Metrology