TECHNOLOGY

ZDOT WITH MULTI-MODE TECHNOLOGY

Zeta Non-contact Optical Profiler integrates five powerful optical metrology technologies in one fully configurable and easy-to-use system.


It images and analyzes different size features on samples of all types: smooth to rough, very low to very high reflectivity, transparent to opaque, single layer to multilayer, sub-nm to mm. The versatility of the Zeta technology is simply unmatched by any other metrology tools.


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METROLOGY

ZDot™

Zeta's proprietary 3D imaging technology combines innovative optics with powerful software algorithms to produce great results even for difficult surfaces

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ZSI

Convert any objective into a shearing interferometer to provide very high Z resolution images

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ZX5 & ZX100

Interferometer optics enables wide area measurements with a high Z resolution

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ZFT

Integrated broad-band reflectometer for thin film thickness and surface reflectance measurements

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ZIC

Zeta’s unique interference contrast technique providing enhanced & quantitative images of sub-nanometer level roughness

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INSPECTION

AOI

Zeta Automated Optical Inspection option combines Metrology and Defect Inspection into one efficient, cost effective, and powerful system

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ZetaScan

ZetaScan inspect the full surface of a wafer, disk, or glass for particle, pits, bumps, and many other surface defects in seconds

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SOFTWARE

ZMorf

ZMorf - advanced analysis software

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