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SHEARING INTERFEROMETRY

ZSI

The Zeta Shearing Interferometer (ZSI) further enhances ZIC technique by incorporating a proprietary phase adjustment mechanism and advanced data processing software. The result is a non-contact optical profiler with Angstrom level Z sensitivity.


The ZSI technique does not require expensive interferometric objectives or special vibration isolation tables. In addition, no Z scanning is necessary. All these translate to better XY resolution, higher level of user friendliness, faster and more reliable data acquisition, and less facility and maintenance related costs.



Typical Optical Parameters
Objective Mag 5X to 100X
Field of View 90 μm to 4.5 mm
Z Sensivity < 0.5 Å

SPEAK TO OUR SPECIALISTS

(855) 405-8008

IMMEDIATE PRODUCT INFORMATION





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