HIGH BRIGHTNESS LED
- AOI and PSS metrology in one compact platform
- Fully automated single button operation
- Integrated multi-cassette sorting enables wafer binning
Production worthy metrology system
features fully automated PSS size, pitch, and height measurement, large field‐of‐view optics, fast and reliable data acquisition, and single bottom operation.
Automatically detect defects on a 4‐inch
wafer in 90 seconds at 1 μm sensitivity. Innovative design combines defect detection and review on a single platform.
Leading PSS manufacturers around the world adopt the Zeta metrology solution because it provides the most stable and repeatable measurements, and is the most user friendly and cost effective.
PSS TYPES AND SIZES
Flat Top PSS
PSS type and size continues to evolve so Zeta continues to
develop its technology to keep up with the industry changes.
DEFECT INSPECTION (AOI)
Close up view of a defect found by AOI
High resolution 3D image of the defect
Detailed 3D data for root cause analysis of the defect
DEFECT TYPE EXAMPLES
LED sapphire wafers need to be sorted by PSS measurement and defect inspection results. The Zeta-360 can measure the PSS, inspect for defects, manage the collected data, and sort the wafers into the appropriate bins without the users having to handle the wafers or the data in between those steps. This greatly simplify, and improve, your manufacturing process flow.