Zeta Instruments designs and manufactures Multi-Mode non-contact optical profilers and defect inspection systems for multiple high-technology industries, including: advanced semiconductor packaging, high-brightness LEDs, advanced glass manufacturing, solar, microfluidics and data storage.

Zeta Instruments has installed more than 250 systems in 23 different countries. The rapid adoption of Zeta’s products is a testament to the company’s differentiated technology, with 10 issued patents and 13 additional patents in process.

Its locations include headquarters in San Jose, CA, a regional office in Shanghai, China, and sales and service representatives worldwide.

Our growth has been driven by rapid technology progress combined with strong focus on customer requirements.

Zeta Instruments was acquired by KLA-Tencor Corporation in June, 2017.


Experienced team with proven track records

The team at Zeta has been working together for several decades. In addition to developing the current family of Zeta products, they were key members of the technical teams that developed many industry leading products such as:

  • AlphaStep® and P-series surface profilers
  • Surfscan®, AIT, and Candela™ defect inspection systems
  • Ultrapointe 3D confocal defect review systems
  • VisEdge wafer edge inspection system

Note: AlphaStep® and Surfscan® are registered products of KLA-Tencor Corporation. Candela™ is a trademarked product by KLA-Tencor Corporation. Some or all of these product names may be the registered trademarks of KLA-Tencor Corporation.