Zeta Instruments designs and manufactures Multi-Mode non-contact optical profilers and defect inspection systems for multiple high-technology industries, including: advanced semiconductor packaging, high-brightness LEDs, advanced glass manufacturing, solar, microfluidics and data storage.

Zeta Instruments has installed more than 250 systems in 23 different countries. The rapid adoption of Zeta’s products is a testament to the company’s differentiated technology, with 10 issued patents and 13 additional patents in process.

Its locations include headquarters in San Jose, CA, a regional office in Shanghai, China, and sales and service representatives worldwide.

Our growth has been driven by rapid technology progress combined with strong focus on customer requirements.


Experienced team with proven track records

The team at Zeta has been working together for several decades. In addition to developing the current family of Zeta products, they were key members of the technical teams that developed many industry leading products such as:

  • AlphaStep® and P-series surface profilers
  • Surfscan®, AIT, and Candela™ defect inspection systems
  • Ultrapointe 3D confocal defect review systems
  • VisEdge wafer edge inspection system

Note: AlphaStep® and Surfscan® are registered products of KLA-Tencor Corporation. Candela™ is a trademarked product by KLA-Tencor Corporation. Some or all of these product names may be the registered trademarks of KLA-Tencor Corporation.


Rusmin Kudinar - CEO

Rusmin Kudinar has over 30 years of experience in designing tools for metrology and defect inspection. Prior to Zeta Instruments, Rusmin Kudinar was the Vice President and General Manager of the Candela Division of KLA-Tencor where he was responsible of the Candela defect inspection and Surface Metrology product lines. He was a co-founder and CEO of Candela Instruments which was acquired by KLA-Tencor in 2004. Prior to founding Candela, he spent 14+ years as a member of the engineering team of Tencor Instruments that developed several industry leading products such as AlphaStep and the P-Series stylus profilers. Rusmin has a Masters degree in Mechanical Engineering from Stanford University.

Dr. James Xu - Chief Technical Officer

Jim Xu is a co-founder of Zeta Instruments and co-inventor of the 3D imaging technologies that are used in all Zeta3D Optical Profilers. Prior to Zeta Instruments, Jim was a co-founder and the President of CoreTech Optical, a custom metrology and inspection solution provider for Silicon Valley high-tech companies. Earlier, Jim was a program manager of JDS Uniphase Corp. in charge of developing optical inspection and metrology systems for fiber optic components production. Jim started his career as an applications lab manager of Ultrapointe Corp. and later took over optical system design responsibility for its state-of-art 3D laser confocal defect review system. Ultrapointe was acquired by KLA-Tencor in 1999. Jim has a Ph. D. in Physics from Syracuse University and an MBA from Santa Clara University.

Zhen Hou, Ph.D. - General Manager, China

Zhen Hou has over 15 years of experience in software development, especially on image processing and analysis for inspection and metrology equipments. He served as software manager at Zeta Instruments. Prior to Zeta Instruments, he was a senior software engineer at KLA-Tencor Corp. Zhen Hou holds a Ph.D. from School of Engineering at University of Kentucky and both a B.S. and M.S. in Precision Instruments at Tsinghua University in Beijing, China.

Dr. Steven Meeks - Chief Scientist

Steve has over 40 years of experience in designing optical tools for defect inspection and metrology. Prior to Zeta Instruments, Steve Meeks was a Vice President of Technology at KLA-Tencor. Earlier, Steve was a co-founder and CTO of Candela Instruments which was founded in 1997. Steve was a research scientist at IBM Almaden Research Center in the early ’90s, where he developed numerous disk inspection systems. Steve started his career at the Naval Research Laboratory in Orlando, Florida and received his Ph. D. in Applied Physics from Stanford University. As a prolific inventor, Steve has over 65 patents and has published numerous technical papers.

Ronny Soetarman - Software Director

One of Zeta’s technical strength is in the software team’s ability to create image processing algorithms and in making powerful software easy to use for non-expert users. Ronny is instrumental in both creating the team and writing many of the programs within the Zeta software. He was a co-founder of Candela Instruments where he developed most of the company’s defect classification software. Prior to Candela, Ronny worked at Schlumberger Technologies and Valid Logic Systems. He received his Masters degree in Computer Engineering from Stanford University.

Hung Nguyen - VP Hardware Engineering

Hung developed several generations of products as the Senior Director of the Candela engineering team from 1999 to 2009. He founded HNA Engineering, a successful consulting firm that provided electronics design services to leading semiconductor equipment companies. He was one of the principal engineers in the development of Tencor Instruments’ patterned wafer inspection systems. Hung received his Masters degree in Electrical Engineering from San Jose State University where he was also a lecturer for several electrical engineering classes.

Vamsi Velidandla - VP Marketing

Vamsi has 15+ years of product and applications development experience in the surface metrology and defect inspection fields. He joined Candela Instruments as an early employee after starting his career as an Application Engineer in the Surface Metrology Division of Tencor Instruments. He became the Director of Applications of the Candela Division after it was acquired by KLA-Tencor. Later he became the Sr. Director of Engineering and General Manager of the ADE PhaseShift business unit after it was acquired by KLA-Tencor. Vamsi received his Masters degree in Mechanical Engineering from Arizona State University in Tempe, Arizona.

Ben Garland – US Sales Director

Ben has over 19 years of technical sales & management experience. Prior to joining Zeta Instruments in 2009, he was a Sales Engineer and Area Technical Manager for Thermo Fisher Scientific, formerly Nicolet where he was a successful solutions provider responsible for the sales of the Nicolet branded spectroscopy systems. These products included both micro & macro FTIR, Raman & NIR spectrometer systems serving customers in the semiconductor, electronics, biotech, university, government, solar, aerospace, & pharmaceutical industries. He was also member of Thermo’s elite “taste-makers” group to help test, develop, and market new spectroscopy products. He has a MS degree in chemistry from the University of Utah and a BS degree in chemistry with a minor in physics from Idaho State University.